Creep of Al underlayer determined by channel cracking of topical Si3N4 film
Publication information:
193, Seyed M. Allameh, Zhigang Suo, and Wole Soboyejo and. 2007. “Creep of Al Underlayer Determined by Channel Cracking of Topical Si3N4 Film”. Materials and Manufacturing Processes, 22, Pp. 170-74