A nanoelectromechanical systems actuator driven and controlled by Q-factor attenuation of ring resonator

Publication information:

319, B. Dong, H. Cai, P. Kropelnicki G. I. Ng, J. M. Tsai, A. B. Randles, M. Tang, Y. D. Gu, Z. G. Suo, and A. Q. Liu. 2013. “A Nanoelectromechanical Systems Actuator Driven and Controlled by Q-Factor Attenuation of Ring Resonator”. Applied Physics Letters, 103, Pp. 181105