a-Si:H TFTs made on polyimide foil by PE-CVD at 150°C

Publication information:

81, H. Gleskova, S. Wagner, and Z. Suo. 1998. “A-Si:H TFTs Made on Polyimide Foil by PE-CVD at 150°C”. MRS Symposium Proceedings, 508, Pp. 73-78
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