Strain relaxation of SiGe islands on compliant oxide.
Publication information:
128, H. Yin, R. Huang, K.D. Hobart, Z. Suo, T.S. Kuan, C.K. Inoki, S.R. Shieh, T.S. Duffy, F.J. Kub, and J.C. Sturm ". 2002. “Strain Relaxation of SiGe Islands on Compliant Oxide”. Journal of Applied Physics, 91, Pp. 9716-22